PI Introduces S-335 Fast Steering Mirror Platform

PI (Physik Instrumente) has announced the S-335 fast steering mirror (FSM) platforms to broaden its portfolio of piezo steering mirrors. With milli-second response and settling time and dynamic linearity, the new S-335’s are ideal for precision image processing and image stabilization, laser beam steering, materials processing, and lithography.

S-335 steering mirror platforms provide precise angular tip/tilt motion of the top platform around two orthogonal axes. These flexure-guided, electro-ceramic driven systems can provide higher accelerations than other actuators, enabling step response times in the sub-millisecond range, with frictionless backlash-free motion. The single pivot-point design also prevents the drawback of polarization rotation, which is common with conventional 2-axis stacked systems, e.g. galvo scanners.

Integrated EDM flexure based motion amplifiers provide an tip/tilt angle up to 35mrad, equal to an optical deflection angle of 70mrad (4°). ID chip support allows for fast start-up and a simple data exchange between tip/tilt platforms and controllers.

PI piezo steering mirrors are based on a parallel-kinematics design with coplanar rotational axes and a single moving platform driven by two pairs of differential actuators. Compared to stacked (two-stage) mirror scanners, the parallel-kinematics design provides symmetrical dynamic performance in both axes.

For more information, visit PI website.

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