PI (Physik Instrumente) has engineered and released two multi-axis positioning stages based on low-profile parallel-kinematic motion devices. Driven by piezo ceramic motors, nanometer precision is achieved along with stability based on low heat generation and a drift free auto-position-clamping feature.
This system is based on proprietary PiezoWalk linear motor technology. It provides 2 nanometer minimum incremental motion in X, Y, Z with 0.2 microradian angular motion in Pitch, YAW, and Roll. The N-865 can support loads up to 15N. Integrated proprietary linear encoders measure the position with 0.5 nanometers resolution.
The Q-845 is 6-axis system based on piezo inertia drives, providing minimum incremental motion as small as 6 nanometers. Integrated linear encoders measure the position with 1 nanometer resolution and provide feedback to the 6-axis controller. The Q-845 supports loads to 10 N and achieves velocities up to 5mm/sec.
Both 6-axis systems provide software programmable virtual pivot points – a decisive feature for alignment processes such as required in SiP and micro-optics applications.
For more information, visit PI website.