Micromachining Books

• Initiatives of Precision Engineering at the Beginning of a Millennium - ultra-precision machining and micro machining, nanotechnology for fabrication and measurement, chemo-mechanical processes, rapid prototyping, Ichiro Inasaki, Springer, 2001
• MEMS/NEMS: Handbook Techniques and Applications - design methods, fabrication techniques, manufacturing methods, sensors and actuators, and micro optical electro mechanical systems, Cornelius T Leondes, Springer, 2006
• Micromachining and Microfabrication Process Technology IV - analysis of micromachining and microfabrication process technology, James H. Smith, SPIE, 1998
• Micromachining of Engineering Materials - discusses advances in material removal that have led to micromachining, procedures for precise measurement, investigates nanomachining, JA McGeough, CRC Press, 2002
• Micromachining Optical Components and Precision Engineering -  ultraprecision, precision engineering, precision machining, Peter Langenbeck, European Physical Society, SPIE--International Society for Optical Engineering, 1989
• Micromachining Technology for Micro-optics and Nano-optics IV - microlens, beam lithography, photonic, ray lithography, microlenses, micromachining, Eric G. Johnson, Gregory P Nordin, Thomas J Suleski, SPIE, 2006
• Micromanufacturing and Nanotechnology - manufacturing of products and systems at the micro and nano scale levels, N. P. Mahalik, Springer, 2006
• Micro Process Engineering - reviews and case studies on technologies, devices and advanced systems from the micro and nano worlds, Norbert Kockmann, Wiley-VCH, 2006