Laser Fabrication and Machining of Materials - fundamental principles an emerging
applications of lasers related to material removal and forming. Dahotre, Narendra B., Harimkar, Sandip
P, Springer 2008
MEMS/NEMS: Handbook Techniques and Applications - design methods, fabrication techniques,
manufacturing methods, sensors and actuators, and micro optical
electro mechanical systems, Cornelius T Leondes, Springer, 2006
Micromachined Mirrors -scanning mirrors, surface
micromachined mirrors, staggered torsional combdrive (STEC)
micro mirror, applications of scanning mirrors, Conant Robert,
Springer 2003
Micromachining of Engineering Materials -
discusses advances in material removal that have led to micromachining,
procedures for precise measurement, investigates nanomachining, JA McGeough, CRC Press, 2002
Micro
Process Engineering - reviews and case studies
on technologies, devices and advanced systems from the micro and nano worlds, Norbert Kockmann, Wiley-VCH, 2006
Semiconductor Micromachining - two volume guide covering
topics from chemical processes to microstructuring of
semiconductors, Other Campbell, S. A., John Wiley & Sons Ltd,
1998
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